"Precise nanofabrication with multiple ion beams for advanced circuit edit."

Huimeng Wu, David Ferranti, Lewis Stern (2014)

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DOI: 10.1016/J.MICROREL.2014.08.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Huimeng Wu, David Ferranti, Lewis Stern:
Precise nanofabrication with multiple ion beams for advanced circuit edit. Microelectron. Reliab. 54(9-10): 1779-1784 (2014)

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