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"Plasma Charging Damage Reduction in IC Processing by A Self-balancing ..."
Zhichun Wang et al. (2004)
- Zhichun Wang, Jan Ackaert, Cora Salm
, Fred G. Kuper, Eddy De Backer:
Plasma Charging Damage Reduction in IC Processing by A Self-balancing Interconnect. Microelectron. Reliab. 44(9-11): 1503-1507 (2004)
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