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"Detection of failure mechanisms in 24-40 nm FinFETs with (spectral) ..."
Ivo Vogt et al. (2018)
- Ivo Vogt, Tomonori Nakamura, Ingrid De Wolf, Christian Boit:
Detection of failure mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera. Microelectron. Reliab. 88-90: 334-338 (2018)
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