"Device characterization of 16/14 nm FinFETs for reliability ..."

Ivo Vogt et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.07.012

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type: Journal Article

metadata version: 2020-03-31

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Ivo Vogt, Tomonori Nakamura, B. Motamedi, Christian Boit:
Device characterization of 16/14 nm FinFETs for reliability assessment with infrared emission spectra. Microelectron. Reliab. 88-90: 11-15 (2018)

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