"Multiscale modelling of multilayer substrates."

R. L. J. M. Ubachs et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.07.013

access: closed

type: Journal Article

metadata version: 2023-09-30

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R. L. J. M. Ubachs, Olaf van der Sluis, W. D. van Driel, G. Q. Zhang:
Multiscale modelling of multilayer substrates. Microelectron. Reliab. 46(9-11): 1472-1477 (2006)

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