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"Impact of O-Si-O bond angle fluctuations on the Si-O bond-breakage rate."

Stanislav Tyaginov et al. (2009)

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DOI: 10.1016/J.MICROREL.2009.06.018

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/TyaginovSSGG09
Stanislav Tyaginov, Viktor Sverdlov, Ivan A. Starkov, Wolfgang Gös, Tibor Grasser:
Impact of O-Si-O bond angle fluctuations on the Si-O bond-breakage rate. Microelectron. Reliab. 49(9-11): 998-1002 (2009)

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