"Impact of interface nature on deep sub-micron Al-plug resistance."

Bing-Yue Tsui, Tsung-Ju Yang, Tzu-Kun Ku (2001)

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DOI: 10.1016/S0026-2714(01)00090-7

access: closed

type: Journal Article

metadata version: 2020-02-22

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Bing-Yue Tsui, Tsung-Ju Yang, Tzu-Kun Ku:
Impact of interface nature on deep sub-micron Al-plug resistance. Microelectron. Reliab. 41(11): 1889-1896 (2001)

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