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"MEMS reliability from a failure mechanisms perspective."

W. Merlijn van Spengen (2003)

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DOI: 10.1016/S0026-2714(03)00119-7

access: closed

type: Journal Article

metadata version: 2020-02-22

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W. Merlijn van Spengen:
MEMS reliability from a failure mechanisms perspective. Microelectron. Reliab. 43(7): 1049-1060 (2003)

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