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"Long-term reliability of Ti-Pt-Au metallization system for Schottky ..."

A. Sozza et al. (2004)

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DOI: 10.1016/J.MICROREL.2004.01.017

access: closed

type: Journal Article

metadata version: 2024-05-07

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A. Sozza, Christian Dua, A. Kerlain, C. Brylinski, Enrico Zanoni:
Long-term reliability of Ti-Pt-Au metallization system for Schottky contact and first-level metallization on SiC MESFET. Microelectron. Reliab. 44(7): 1109-1113 (2004)

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