"Two-dimensional dopant profiling in semiconductor devices by electron ..."

Ulugbek Shaislamov et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.06.002

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ulugbek Shaislamov, Jun-Mo Yang, Jung Ho Yoo, Hyun-Sang Seo, Kyung-Jin Park, Chel-Jong Choi, Tae-Eun Hong, Beelyong Yang:
Two-dimensional dopant profiling in semiconductor devices by electron holography and chemical etching delineation techniques with the same specimen. Microelectron. Reliab. 48(10): 1734-1736 (2008)

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