"Effects of aluminum incorporation on hafnium oxide film using plasma ..."

Banani Sen et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.07.069

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type: Journal Article

metadata version: 2020-02-22

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Banani Sen, Bing-Liang Yang, Hei Wong, Chi-Wah Kok, P. K. Chu, A. Huang:
Effects of aluminum incorporation on hafnium oxide film using plasma immersion ion implantation. Microelectron. Reliab. 48(11-12): 1765-1768 (2008)

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