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"Optimizing focused ion beam created solid immersion lenses in bulk silicon ..."

Philipp Scholz et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.031

access: closed

type: Journal Article

metadata version: 2020-02-22

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Philipp Scholz, Christian Gallrapp, Uwe Kerst, Ted R. Lundquist, Christian Boit:
Optimizing focused ion beam created solid immersion lenses in bulk silicon using design of experiments. Microelectron. Reliab. 50(9-11): 1441-1445 (2010)

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