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"Contact to contacts or silicide by use of backside FIB circuit edit ..."
Rudolf Schlangen et al. (2006)
- Rudolf Schlangen, Peter Sadewater, Uwe Kerst, Christian Boit:
Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node. Microelectron. Reliab. 46(9-11): 1498-1503 (2006)
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