"FIB/TEM analysis supported by μ-probing approach to identify via ..."

Marco Sanna, Matteo Medda (2012)

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DOI: 10.1016/J.MICROREL.2012.06.043

access: closed

type: Journal Article

metadata version: 2020-02-22

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Marco Sanna, Matteo Medda:
FIB/TEM analysis supported by μ-probing approach to identify via marginality. Microelectron. Reliab. 52(9-10): 2050-2053 (2012)

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