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"Advanced methods for mechanical and structural characterization of ..."

Christoph Sander et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.124

access: closed

type: Journal Article

metadata version: 2022-10-02

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  - https://dblp.org/rec/journals/mr/SanderSNRCGZ14
Christoph Sander, Yvonne Standke, Sven Niese, Rüdiger Rosenkranz, André Clausner, Martin Gall, Ehrenfried Zschech:
Advanced methods for mechanical and structural characterization of nanoscale materials for 3D IC integration. Microelectron. Reliab. 54(9-10): 1959-1962 (2014)

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