"Advanced methods for mechanical and structural characterization of ..."

Christoph Sander et al. (2014)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2014.07.124

access: closed

type: Journal Article

metadata version: 2022-10-02

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/SanderSNRCGZ14
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/SanderSNRCGZ14
Christoph Sander, Yvonne Standke, Sven Niese, Rüdiger Rosenkranz, André Clausner, Martin Gall, Ehrenfried Zschech:
Advanced methods for mechanical and structural characterization of nanoscale materials for 3D IC integration. Microelectron. Reliab. 54(9-10): 1959-1962 (2014)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.