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"Elemental characterisation of sub 20 nm structures in devices using new ..."
James T. Sagar et al. (2016)
- James T. Sagar, Simon R. Burgess, Connor McCarthy, Xiaobing Li:
Elemental characterisation of sub 20 nm structures in devices using new SEM-EDS technology. Microelectron. Reliab. 64: 367-369 (2016)
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