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"Elemental characterisation of sub 20 nm structures in devices using new ..."

James T. Sagar et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.080

access: closed

type: Journal Article

metadata version: 2020-12-15

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James T. Sagar, Simon R. Burgess, Connor McCarthy, Xiaobing Li:
Elemental characterisation of sub 20 nm structures in devices using new SEM-EDS technology. Microelectron. Reliab. 64: 367-369 (2016)

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