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"Monolithic integrable capacitive humidity sensing method for material ..."
Andreas Rückerl et al. (2014)
- Andreas Rückerl, Sophia Huppmann, Roland Zeisel, Simeon Katz:
Monolithic integrable capacitive humidity sensing method for material characterization of dielectric thin films. Microelectron. Reliab. 54(9-10): 1741-1744 (2014)
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