"Discovering and reducing defects in MIM capacitors."

William J. Roesch, Dorothy June M. Hamada (2018)

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DOI: 10.1016/J.MICROREL.2017.10.021

access: closed

type: Journal Article

metadata version: 2020-02-22

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William J. Roesch, Dorothy June M. Hamada:
Discovering and reducing defects in MIM capacitors. Microelectron. Reliab. 81: 299-305 (2018)

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