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"Reliability testing of integrated low-temperature PVD PZT films."

Daniel Monteiro Diniz Reis, Sven Rzepka, Karla Hiller (2018)

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DOI: 10.1016/J.MICROREL.2018.06.060

access: closed

type: Journal Article

metadata version: 2022-10-02

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Daniel Monteiro Diniz Reis, Sven Rzepka, Karla Hiller:
Reliability testing of integrated low-temperature PVD PZT films. Microelectron. Reliab. 88-90: 835-839 (2018)

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