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"High-κ dielectric breakdown in nanoscale logic devices - Scientific ..."

Nagarajan Raghavan, Kin Leong Pey, Kalya Shubhakar (2014)

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DOI: 10.1016/J.MICROREL.2014.02.013

access: closed

type: Journal Article

metadata version: 2023-03-21

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Nagarajan Raghavan, Kin Leong Pey, Kalya Shubhakar:
High-κ dielectric breakdown in nanoscale logic devices - Scientific insight and technology impact. Microelectron. Reliab. 54(5): 847-860 (2014)

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