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"2 MeV electron irradiation effects on the electrical characteristics of ..."

Joan Marc Rafí et al. (2013)

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DOI: 10.1016/J.MICROREL.2013.07.023

access: closed

type: Journal Article

metadata version: 2022-06-30

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Joan Marc Rafí, M. B. González, Kenichiro Takakura, I. Tsunoda, M. Yoneoka, Oihane Beldarrain, Miguel Zabala, Francesca Campabadal:
2 MeV electron irradiation effects on the electrical characteristics of MOS capacitors with ALD Al₂O₃ dielectrics of different thickness. Microelectron. Reliab. 53(9-11): 1333-1337 (2013)

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