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"On the data interpretation of the C-AFM measurements in the ..."

J. Pétry et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.041

access: closed

type: Journal Article

metadata version: 2020-02-22

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J. Pétry, Wilfried Vandervorst, Luigi Pantisano, Robin Degraeve:
On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers. Microelectron. Reliab. 45(5-6): 815-818 (2005)

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