"SEM-based nanoprobing on 32 and 28 nm CMOS devices challenges for ..."

Erik Paul et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.133

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type: Journal Article

metadata version: 2020-02-22

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Erik Paul, Holger Herzog, Sören Jansen, Christian Hobert, Eckhard Langer:
SEM-based nanoprobing on 32 and 28 nm CMOS devices challenges for semiconductor failure analysis. Microelectron. Reliab. 54(9-10): 2115-2117 (2014)

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