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"Conduction mechanisms and an evidence for phonon-assisted conduction ..."

Albena Paskaleva, Anton J. Bauer, Martin Lemberger (2005)

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DOI: 10.1016/J.MICROREL.2004.12.018

access: closed

type: Journal Article

metadata version: 2020-10-26

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Albena Paskaleva, Anton J. Bauer, Martin Lemberger:
Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf_xTi_ySi_zO films. Microelectron. Reliab. 45(7-8): 1124-1133 (2005)

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