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"Reliability of MEMS shallow arches based actuator under the combined ..."

Hassen M. Ouakad, Jihad E. AlQasimi (2017)

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DOI: 10.1016/J.MICROREL.2017.10.017

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hassen M. Ouakad, Jihad E. AlQasimi:
Reliability of MEMS shallow arches based actuator under the combined effect of mechanical shock and electric loads. Microelectron. Reliab. 79: 352-359 (2017)

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