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"Application of high frequency scanning acoustic microscopy for the failure ..."
Stefan Oberhoff et al. (2016)
- Stefan Oberhoff, Kay Goetz, Karin Trojan, Martin Zoeller, Joachim Glueck:
Application of high frequency scanning acoustic microscopy for the failure analysis and reliability assessment of MEMS sensors. Microelectron. Reliab. 64: 656-659 (2016)
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