"Electrical properties of MIS capacitor using low temperature electron beam ..."

V. Mikhelashvili et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.022

access: closed

type: Journal Article

metadata version: 2020-02-22

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V. Mikhelashvili, B. Meyler, J. Shneider, O. Kreinin, Gadi Eisenstein:
Electrical properties of MIS capacitor using low temperature electron beam gun - evaporated HfAlO dielectrics. Microelectron. Reliab. 45(5-6): 933-936 (2005)

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