"Stress imaging in structural challenging MEMS with high sensitivity using ..."

Peter Meszmer et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.10.010

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type: Journal Article

metadata version: 2023-09-30

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Peter Meszmer, Raul D. Rodriguez, Evgeniya Sheremet, Dietrich R. T. Zahn, Bernhard Wunderle:
Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy. Microelectron. Reliab. 79: 104-110 (2017)

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