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"Study of non-contact nano-probing technique using FIB."

Yoji Mashiko et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.037

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/MashikoEFNI10
Yoji Mashiko, Hiroaki Etoh, Akiyoshi Furukawa, Daisuke Nomiyama, Osamu Ichimaru:
Study of non-contact nano-probing technique using FIB. Microelectron. Reliab. 50(9-11): 1451-1453 (2010)

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