"Thermal fatigue life estimation and delamination mechanics studies of ..."

A. R. Maligno, David C. Whalley, Vadim V. Silberschmidt (2012)

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DOI: 10.1016/J.MICROREL.2012.03.023

access: closed

type: Journal Article

metadata version: 2021-07-15

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A. R. Maligno, David C. Whalley, Vadim V. Silberschmidt:
Thermal fatigue life estimation and delamination mechanics studies of multilayered MEMS structures. Microelectron. Reliab. 52(8): 1665-1678 (2012)

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