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"Electron beam induced carbon deposition using hydrocarbon contamination ..."

J. S. Luo et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.046

access: closed

type: Journal Article

metadata version: 2024-05-06

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J. S. Luo, C. S. Sung, W. S. Hsu, L. Y. Huang, Jeremy D. Russell:
Electron beam induced carbon deposition using hydrocarbon contamination for XTEM analysis. Microelectron. Reliab. 50(9-11): 1446-1450 (2010)

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