BibTeX record journals/mr/LuRSYKBUG12

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@article{DBLP:journals/mr/LuRSYKBUG12,
  author    = {Yang Lu and
               E. Ramsay and
               C. R. Stockbridge and
               A. Yurt and
               F. H. K{\"{o}}kl{\"{u}} and
               T. G. Bifano and
               M. S. {\"{U}}nl{\"{u}} and
               Bennett B. Goldberg},
  title     = {Spherical aberration correction in aplanatic solid immersion lens
               imaging using a {MEMS} deformable mirror},
  journal   = {Microelectron. Reliab.},
  volume    = {52},
  number    = {9-10},
  pages     = {2120--2122},
  year      = {2012},
  url       = {https://doi.org/10.1016/j.microrel.2012.06.026},
  doi       = {10.1016/j.microrel.2012.06.026},
  timestamp = {Sat, 22 Feb 2020 19:26:40 +0100},
  biburl    = {https://dblp.org/rec/journals/mr/LuRSYKBUG12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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