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"Stress analysis of CMOS-MEMS microphone under shock loading by Taguchi method."

Chun-Lin Lu, Pei-Rong Ni, Meng-Kao Yeh (2018)

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DOI: 10.1016/J.MICROREL.2018.06.110

access: closed

type: Journal Article

metadata version: 2020-02-22

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Chun-Lin Lu, Pei-Rong Ni, Meng-Kao Yeh:
Stress analysis of CMOS-MEMS microphone under shock loading by Taguchi method. Microelectron. Reliab. 88-90: 824-828 (2018)

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