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"Optical and electrical characterization of hafnium oxide deposited by MOCVD."

Y. Lu et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.015

access: closed

type: Journal Article

metadata version: 2020-02-22

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Y. Lu, Octavian Buiu, Steve Hall, Paul K. Hurley:
Optical and electrical characterization of hafnium oxide deposited by MOCVD. Microelectron. Reliab. 45(5-6): 965-968 (2005)

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