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"Study of glass frit induced stiction using a micromirror array."
Fangzhou Ling et al. (2012)
- Fangzhou Ling, Jeroen De Coster, Ann Witvrouw
, Jean-Pierre Celis, Ingrid De Wolf:
Study of glass frit induced stiction using a micromirror array. Microelectron. Reliab. 52(9-10): 2256-2260 (2012)
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