"Fast electromigration wafer mapping for wafer fab process monitoring and ..."

Yuan Li, Leo van Marwijk, Som Nath (2008)

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DOI: 10.1016/J.MICROREL.2008.07.048

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yuan Li, Leo van Marwijk, Som Nath:
Fast electromigration wafer mapping for wafer fab process monitoring and improvement. Microelectron. Reliab. 48(8-9): 1388-1392 (2008)

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