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"Backside failure analysis case study: Implementation of innovative Local ..."

A. Laroche, P. Rousseille, Thomas Zirilli (2011)

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DOI: 10.1016/J.MICROREL.2011.06.065

access: closed

type: Journal Article

metadata version: 2020-02-22

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A. Laroche, P. Rousseille, Thomas Zirilli:
Backside failure analysis case study: Implementation of innovative Local Backside Deprocessing technique. Microelectron. Reliab. 51(9-11): 1705-1709 (2011)

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