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"Effect of fin shape of tapered FinFETs on the device performance in 5-nm ..."

Erry Dwi Kurniawan et al. (2018)

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DOI: 10.1016/J.MICROREL.2017.06.037

access: closed

type: Journal Article

metadata version: 2020-02-22

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Erry Dwi Kurniawan, Hao Yang, Chia-Chou Lin, Yung-Chun Wu:
Effect of fin shape of tapered FinFETs on the device performance in 5-nm node CMOS technology. Microelectron. Reliab. 83: 254-259 (2018)

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