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"Determination of bulk discharge current in the dielectric film of MEMS ..."

Matroni Koutsoureli, George J. Papaioannou (2011)

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DOI: 10.1016/J.MICROREL.2011.07.021

access: closed

type: Journal Article

metadata version: 2022-10-02

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Matroni Koutsoureli, George J. Papaioannou:
Determination of bulk discharge current in the dielectric film of MEMS capacitive switches. Microelectron. Reliab. 51(9-11): 1874-1877 (2011)

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