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"A study of deposition conditions on charging properties of PECVD silicon ..."

Matroni Koutsoureli et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.08.002

access: closed

type: Journal Article

metadata version: 2022-10-02

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Matroni Koutsoureli, Loukas Michalas, Anestis Gantis, George J. Papaioannou:
A study of deposition conditions on charging properties of PECVD silicon nitride films for MEMS capacitive switches. Microelectron. Reliab. 54(9-10): 2159-2163 (2014)

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