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"Novel charge neutralization techniques applicable to wide current range of ..."

Hirotaka Komoda et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.01.014

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hirotaka Komoda, Masaaki Yoshida, Yoh Yamamoto, Kouji Iwasaki, Ikuko Nakatani, Heiji Watanabe, Kiyoshi Yasutake:
Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system. Microelectron. Reliab. 46(12): 2085-2095 (2006)

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