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"Simulation of the influence of TiAl3 layers on the ..."

Jörg Kludt et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.129

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jörg Kludt, Kirsten Weide-Zaage, Markus Ackermann, Verena Hein:
Simulation of the influence of TiAl₃ layers on the thermal-electrical and mechanical behaviour of Al metallizations. Microelectron. Reliab. 52(9-10): 1987-1992 (2012)

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