"Integration technology for ferroelectric memory devices."

Kinam Kim, Yoon-Jong Song (2003)

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DOI: 10.1016/S0026-2714(02)00285-8

access: closed

type: Journal Article

metadata version: 2020-02-22

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Kinam Kim, Yoon-Jong Song:
Integration technology for ferroelectric memory devices. Microelectron. Reliab. 43(3): 385-398 (2003)

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