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"Performance properties in thick film silicate dielectric layers using ..."

Nancy Iwamoto, Ahila Krishnamoorthy, Richard Spear (2009)

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DOI: 10.1016/J.MICROREL.2009.03.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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Nancy Iwamoto, Ahila Krishnamoorthy, Richard Spear:
Performance properties in thick film silicate dielectric layers using molecular modeling. Microelectron. Reliab. 49(8): 877-883 (2009)

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