"An improved isothermal electromigration test for Cu-damascene ..."

Maurizio Impronta, Sandro Farris, Andrea Scorzoni (2004)

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DOI: 10.1016/J.MICROREL.2004.07.097

access: closed

type: Journal Article

metadata version: 2020-02-22

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Maurizio Impronta, Sandro Farris, Andrea Scorzoni:
An improved isothermal electromigration test for Cu-damascene characterization. Microelectron. Reliab. 44(9-11): 1855-1860 (2004)

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