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"Effect of microwave annealing on SOI MOSFETs: Post-metal annealing with ..."

Eun-Ki Hong, Won-Ju Cho (2018)

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DOI: 10.1016/J.MICROREL.2017.07.070

access: closed

type: Journal Article

metadata version: 2020-02-22

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Eun-Ki Hong, Won-Ju Cho:
Effect of microwave annealing on SOI MOSFETs: Post-metal annealing with low thermal budget. Microelectron. Reliab. 80: 306-311 (2018)

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