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"Determination of doping type by calibrated capacitance scanning microwave ..."

Sören Hommel et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.06.050

access: closed

type: Journal Article

metadata version: 2024-02-05

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Sören Hommel, Nicole Killat, A. Altes, Thomas Schweinböck, Franz Kreupl:
Determination of doping type by calibrated capacitance scanning microwave microscopy. Microelectron. Reliab. 76-77: 218-221 (2017)

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