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"Evaluation new corner stress relief structure layout for high robust ..."

Verena Hein, Jörg Kludt, Kirsten Weide-Zaage (2014)

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DOI: 10.1016/J.MICROREL.2014.07.039

access: closed

type: Journal Article

metadata version: 2020-02-22

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Verena Hein, Jörg Kludt, Kirsten Weide-Zaage:
Evaluation new corner stress relief structure layout for high robust metallization. Microelectron. Reliab. 54(9-10): 1977-1981 (2014)

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