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"Miniaturised multi-MEMS sensor development."

Mathieu Hautefeuille et al. (2009)

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DOI: 10.1016/J.MICROREL.2009.02.017

access: closed

type: Journal Article

metadata version: 2023-09-30

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Mathieu Hautefeuille, Brendan O'Flynn, Frank H. Peters, Conor O'Mahony:
Miniaturised multi-MEMS sensor development. Microelectron. Reliab. 49(6): 621-626 (2009)

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