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"A Novel Automatic Polishing Technique for Micro-Controllers with 45° ..."

Ilana Grimberg et al. (2004)

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DOI: 10.1016/J.MICROREL.2004.07.078

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ilana Grimberg, H. Coulson, K. Williamson, J. Pohl, Z. Shafrir, Efrat Raz:
A Novel Automatic Polishing Technique for Micro-Controllers with 45° off Si <100> Rotation. Microelectron. Reliab. 44(9-11): 1611-1614 (2004)

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